Modified fin cut after epitaxial growth

ABSTRACT

A method of forming a gate located above multiple fin regions of a semiconductor device. The method may include removing unwanted fin structures after epitaxially growing junctions.

BACKGROUND

The present invention relates to semiconductor devices, and particularly to forming source/drain regions and connections on fin field effect transistors.

Field effect transistors (FETs) are commonly employed in electronic circuit applications. FETs may include a source region and a drain region spaced apart by a semiconductor channel region. A gate, including a gate dielectric layer, a work function metal layer, and a metal electrode, may be formed above the channel region. By applying voltage to the gate, the conductivity of the channel region may increase and allow current to flow from the source region to the drain region.

Fin field effect transistors (FinFETs) are an emerging technology which may provide solutions to field effect transistor (FET) scaling problems at, and below, the 22 nm node. FinFET structures may include at least a narrow semiconductor fin gated on at least two sides of each of the semiconductor fin, as well as a source region and a drain region adjacent to the fin on opposite sides of the gate. FinFET structures having n-type source and drain regions may be referred to as nFinFETs, and FinFET structures having p-type source and drain regions may be referred to as pFinFETs.

In some FinFET structures, different materials may be used for the fins of pFinFETs and nFinFETs in order to improve device performance. However, a material that may improve pFinFET performance may reduce nFET performance, and vice versa. For example, while pFinFET performance may be improved by forming fins made of silicon-germanium, nFinFET performance may instead be improved by forming fins made of undoped or carbon-doped silicon and may be degraded by forming fins made of silicon-germanium. Further, pFinFETs and nFinFETs are fabricated on the same substrate.

BRIEF SUMMARY

An embodiment of the invention may include a method of forming a semiconductor structure. The method may include forming fins in a first region, an intermediate region and second region of a substrate. The method may include forming a gate over the at least one fin in the first region of the substrate, the at least one fin in the second region of the substrate and the at least one fin in the intermediate region of the substrate. The method may include forming a first mask above at least the intermediate region of the substrate and the second region of the substrate and epitaxially growing a first junction on the at least one fin located in the first region of the substrate. The method may include removing the first mask, forming a second mask above at least the intermediate region of the substrate and the first region of the substrate and epitaxially growing a second junction on the at least one fin located in the second region of the substrate. The method may include removing the second mask and forming a third mask above the first region of the substrate, the second region of the substrate and the gate. The method may include removing material from the unmasked region and removing the third mask.

Another embodiment of the invention may include a semiconductor structure. The structure may include a first plurality of fins located in a first region of a substrate, where a first junction is located on the first set of fins. The structure may include a second plurality of fins located in a second region of the substrate, where a second junction is located on a second set of fins. The structure may include an intermediate plurality of fins located in an intermediate region of the substrate, where the intermediate region is located between the first and second region. The structure may include a gate running substantially perpendicular to the first plurality of fins, the intermediate plurality of fins, and the third plurality of fins.

BRIEF DESCRIPTION OF THE SEVERAL DRAWINGS

FIG. 1 is a top view of mandrels formed on a substrate, according to an exemplary embodiment;

FIG. 1a is a cross-sectional view of FIG. 1 taken along section line A-A, of mandrels formed on a hardmask, according to an exemplary embodiment;

FIG. 2 is a top view of mandrels on the substrate covered by a deposited spacer film, according to an exemplary embodiment;

FIG. 2a is a cross-sectional view of FIG. 2 taken along section line A-A, of mandrels on the substrate covered by a deposited spacer film, according to an exemplary embodiment;

FIG. 3 is a top view of mandrels formed on the substrate after an etch of the spacer film, according to an exemplary embodiment;

FIG. 3a is a cross-sectional view of FIG. 3 taken along section line A-A, of mandrels formed on the substrate after an etch of the spacer film, according to an exemplary embodiment;

FIG. 4 is a top view of fins formed on the substrate, according to an exemplary embodiment;

FIG. 4a is a cross-sectional view of FIG. 4 taken along section line A-A, of fins formed on the substrate, according to an exemplary embodiment;

FIG. 5 is a top view of fins formed on the substrate, according to an exemplary embodiment;

FIG. 5a is a cross-sectional view of FIG. 5 taken along section line A-A, of fins formed on the substrate, according to an exemplary embodiment;

FIG. 6 is a top view of fins formed on the substrate, according to an exemplary embodiment;

FIG. 6a is a cross-sectional view of FIG. 6 taken along section line A-A, of fins formed on the substrate, according to an exemplary embodiment;

FIG. 7 is a top view of masking a center portion of the fins formed on the substrate, according to an exemplary embodiment;

FIG. 8 is a top view of fins on a substrate, according to an exemplary embodiment;

FIG. 9 is a top view of a gate crossing the fins on the substrate, according to an exemplary embodiment;

FIG. 10 is a top view of masking all but a first region of fins and a gate, according to an exemplary embodiment;

FIG. 11 is a top view of epitaxially growing a material on the fins in a first region, according to an exemplary embodiment;

FIG. 11a is a cross-sectional view of FIG. 11 taken along section line A-A, of epitaxially growing a material on the fins in a first region, according to an exemplary embodiment;

FIG. 12 is a top view of masking all but a second region of fins and a gate, according to an exemplary embodiment;

FIG. 13 is a top view of epitaxially growing a material on the fins in a second region, according to an exemplary embodiment;

FIG. 13a is a cross-sectional view of FIG. 13 taken along section line A-A, of epitaxially growing a material on the fins in a second, according to an exemplary embodiment;

FIG. 14 is a top view of a mask formed over the fins in the first region and second region, according to an exemplary embodiment;

FIG. 15 is a top view of fins and a gate located on a substrate, according to an exemplary embodiment;

FIG. 15a is a cross-sectional view of FIG. 15 taken along section line A-A, of fins and a gate located on a substrate, according to an exemplary embodiment;

FIG. 15b is a cross-sectional view of FIG. 15 taken along section line B-B, of fins and a gate located on a substrate, according to an exemplary embodiment;

Elements of the figures are not necessarily to scale and are not intended to portray specific parameters of the invention. For clarity and ease of illustration, dimensions of elements may be exaggerated. The detailed description should be consulted for accurate dimensions. The drawings are intended to depict only typical embodiments of the invention, and therefore should not be considered as limiting the scope of the invention. In the drawings, like numbering represents like elements.

DETAILED DESCRIPTION

Exemplary embodiments now will be described more fully herein with reference to the accompanying drawings, in which exemplary embodiments are shown. This disclosure may, however, be embodied in many different forms and should not be construed as limited to the exemplary embodiments set forth herein. Rather, these exemplary embodiments are provided so that this disclosure will be thorough and complete and will fully convey the scope of this disclosure to those skilled in the art. In the description, details of well-known features and techniques may be omitted to avoid unnecessarily obscuring the presented embodiments.

For purposes of the description hereinafter, terms such as “upper”, “lower”, “right”, “left”, “vertical”, “horizontal”, “top”, “bottom”, and derivatives thereof shall relate to the disclosed structures and methods, as oriented in the drawing figures. Terms such as “above”, “overlying”, “atop”, “on top”, “positioned on” or “positioned atop” mean that a first element, such as a first structure, is present on a second element, such as a second structure, wherein intervening elements, such as an interface structure may be present between the first element and the second element. The term “direct contact” means that a first element, such as a first structure, and a second element, such as a second structure, are connected without any intermediary conducting, insulating or semiconductor layers at the interface of the two elements.

In the interest of not obscuring the presentation of embodiments of the present invention, in the following detailed description, some processing steps or operations that are known in the art may have been combined together for presentation and for illustration purposes and in some instances may have not been described in detail. In other instances, some processing steps or operations that are known in the art may not be described at all. It should be understood that the following description is rather focused on the distinctive features or elements of various embodiments of the present invention.

FinFET structures may be created using sidewall image transfer as a way to create a pattern to transfer the desired fin pattern onto an underlying substrate. Such structures may create a substrate that contains multiple regions, with high variability of aspect ratios between each region. This may result in a non-uniform deposition of material from one region to, as fluids flow more slowly into voids with high aspect ratios, and may create uneven densities between the regions. This may create problems during chemical mechanical planarization (CMP), as less dense regions would be removed much more easily than other regions, leading to an uneven surface. Additionally, the variable density may ultimately impact the performance of the device, due to the differences in the resulting structures across the device. By performing deposition techniques across regions with substantially similar aspect ratios, structures may be created having substantially similar densities across the device.

Referring now to FIGS. 1 and 1 a, at least one mandrel may be formed above a hardmask layer, located on a semiconductor material. More specifically, the method may begin with providing a hardmask layer 106 above a substrate 108, and subsequently forming a mandrel 110 on top of the hardmask layer 106. The substrate 108 may include a bulk semiconductor or a layered semiconductor such as Si/SiGe, a silicon-on-insulator (SOI), or a SiGe-on-insulator (SGOI). Bulk substrate materials may include undoped Si, n-doped Si, p-doped Si, single crystal Si, polycrystalline Si, amorphous Si, Ge, SiGe, SiC, SiGeC, Ga, GaAs, InAs, InP and all other III/V or II/VI compound semiconductors. A bulk substrate is illustrated in the figures and is relied upon for the corresponding discussion. The hardmask layer 106 may include multiple layers. In one embodiment, the hardmask layer 106 may include silicon oxide, silicon nitride, a metal-nitride, such as titanium-nitride (TiN), boron-nitride (BN), or a metal-oxide, or any combination thereof. Further, in one embodiment, the hardmask layer 106 may have a thickness, in some embodiments, ranging from about 5 nm to about 80 nm.

The mandrel 110 may be generated using known photolithography and masking techniques. During this step, a mandrel layer may be formed on top of the hardmask layer 106. The mandrel layer may include amorphous silicon or any silicon based compound, for example, silicon nitride, silicon oxide, or silicon carbon, or alternatively amorphous carbon. The mandrel layer may preferably include a material that is different enough from the material of the sidewall spacers (described below) and the material of the hardmask layer 106 so that it may be selectively removed. The particular material chosen may partly depend upon the desired pattern to be formed and the materials chosen in subsequent steps discussed below. In one embodiment, the mandrel layer may be formed with a vertical thickness ranging from about 30 nm to about 150 nm. The mandrel layer may then be lithographically patterned to create the mandrel 110. The mandrel 110 may be formed by applying known patterning techniques involving exposing a photo-resist and transferring the exposed pattern of the photo-resist by etching the mandrel layer.

Referring now to FIGS. 2 and 2 a, a patterning material may be deposited above the hardmask and the mandrel. More specifically, the method may include conformally depositing a layer of material (hereinafter “conformal layer 112”) directly on top of the hardmask layer 106 and the mandrel 110. The conformal layer may include any material capable of being selectively maintained with respect to the mandrel 110. In one embodiment, the conformal layer 112 may include, for example, silicon nitride or silicon oxide. It should be noted, however, that the conformal layer 112 should be of a material capable of being removed selective to the hardmask layer 106. For example, if the hardmask layer 106 is an oxide then the conformal layer 112 may preferably be a nitride, or alternatively, if the hardmask layer 106 is a nitride then the conformal layer 112 may preferably be an oxide. The conformal layer 112 may be deposited with a conformal deposition technique, using any known atomic layer deposition technique, molecular layer deposition techniques, or future developed deposition technique. In one embodiment, the conformal layer 112 may have a substantially uniform thickness. In one embodiment, the conformal layer 112 may have a conformal and uniform thickness ranging from about 5 nm to about 50 nm.

Referring now to FIGS. 3 and 3 a, the patterning material may be etched to form sidewall structures located on the sides of the mandrels. More specifically, the method may include forming sidewall spacers 114 by subjecting the conformal layer 112 (FIG. 2) to a directional etching process such as a reactive-ion-etching technique. The directional etching process may remove a portion of the conformal layer 112 (FIG. 2) from above the hardmask layer 106 and from the top of the mandrel 110. A portion of the dielectric layer may remain along opposite sidewalls of the mandrel 110, forming the sidewall spacers 114. Furthermore, the mandrel 110 and the sidewall spacers 114 should each include materials that would allow the mandrel 110 to be subsequently removed selective to the sidewall spacers 114. Here, it should also be noted that the sidewall spacers 114 depicted in FIGS. 3 and 3A are for illustration purposes and generally may have a slightly different shape from those shown. For example, the sidewall spacers 114 may have rounded corners that may be naturally formed during the directional etching process as is known in the art. The sidewall spacers 114 will eventually define a fin pattern which ultimately may be transferred into the underlying substrate 108.

Referring now to FIGS. 4 and 4 a, the mandrels may be removed, leaving only the sidewall structures. More specifically, the mandrel 110 may be removed selective to the sidewall spacers 114. A non-selective breakthrough etch may be applied to the mandrel 110. In one embodiment, the mandrel 110 is silicon, and the sidewall spacers 114 are an oxide. In such cases, the silicon may be removed selective to the oxide. Furthermore, the mandrel 110 may be removed selective to the hardmask layer 106. In one embodiment, the mandrel 110 may be removed using a typical standard clean technique, including ammonium hydroxide and hydrogen peroxide, in which the sidewall spacers 114 will not be trimmed.

Referring now to FIGS. 5 and 5 a, an anisotropic etch may be performed to transfer the patterns of the sidewall to the underlying semiconductor material. More specifically, a fin pattern defined by the sidewall spacers 114 may be transferred into the substrate 108 using a multi-sequence etching technique. First, the hardmask layer 106 (FIGS. 4 and 4 a) may be etched to expose the substrate 108. A directional etching technique such as a reactive-ion-etching (RIE) technique may be used to etch the hardmask layer 106, forming fin caps 116. In one embodiment, where the hardmask layer 106 is an oxide, a reactive-ion-etching technique using a fluorocarbon based etchant with additional gases such as O₂ or Ar may be used. In the present step, the sidewall spacers 114 may function as a mask, and may have high etch selectivity relative to the hardmask layer 106.

Next, the substrate 108 may then be etched to a desired depth, form at least one fin body 120. The desired depth may depend on the ultimate function of the semiconductor structure. A directional etching technique such as a reactive-ion-etching technique may be used to etch the substrate 108. In one embodiment, the substrate 108 may be etched with a reactive-ion-etching technique using a chlorine or a bromine based etchant. In the present step, the hardmask layer 106 may function as a mask, and may have a high etch-selectivity relative to the substrate 108. Furthermore, the sidewall spacers 114 and the hardmask layer 106 may be removed in subsequent steps using any suitable removal technique known in the art.

Referring now to FIGS. 6 and 6 a, chemical mechanical planarization (CMP) is performed to remove the sidewall spacers 114 and fin caps 116, leaving the fin body 120 on the substrate 108. Following CMP, a semiconductor structure 200 may remain where at least one fin body 120 is located on a substrate 108. The semiconductor structure 200 may have a first fin region 210 and a second fin region 220. The semiconductor structure 200 may have an intermediate fin region 230 located between the first fin region 210 and the second fin region 220. The semiconductor structure 200 may have a central region 240, where the final fin structure may be located. The fin pitch between each fin body 120 may be substantially uniform, such that the distance between adjacent fins in a first fin region 210 is substantially similar to the distance between adjacent fins in adjoining regions (e.g. the distance between a fin on the edge of the first fin region 210 and its adjacent fin on the edge of intermediate fin region 230).

Referring now to FIG. 7, the central region 240 may be masked, leaving an unwanted portion of the fin body 120 exposed. More specifically, the method may include masking a region of the semiconductor by forming a protective layer, patterning the central region 240, and etching the protective layer from the unpatterned regions. The protective layer may include an oxide (e.g. silicon oxide), a nitride (e.g. silicon nitride) or any combinations thereof. Patterning of the desired region may be done through lithographic techniques, to the desired structure. Etching the masking layer stack may be accomplished through any combination of known techniques, such as, for example, RIE, wet stripping and plasma etching.

Referring now to FIG. 8, an etch is performed to remove the exposed portion of the fin body 120 to form at least one fin 140 on the substrate 108. This may be accomplished by any suitable means, such as RIE, plasma etching and wetstripping.

Referring now to FIG. 9, a gate structure 150 is deposited over the fin structures. The gate structure 150 may be located above the substrate 108, and cross over a portion of the fin 140. The gate structure 150 may be substantially perpendicular to the fin 140, having a gate region where the fin 140 passes through the gate structure 150, and a source/drain region of the fin 140 located on both sides of the gate region. The gate structure 150 may contain a gate layer (not shown), a spacer layer (not shown) and a hard cap (not shown). The gate layer may have a height of approximately 40 nm to approximately 200 nm, preferably approximately 50 nm to approximately 150 nm. The gate layer may include a gate dielectric layer (not shown) on the fin 140 and a gate electrode on the gate dielectric layer (not shown) that may be formed via any known process in the art, including a gate-first process and a gate-last process.

In a gate-first process, the gate dielectric layer may include any suitable insulating material including, but not limited to: oxides, nitrides, oxynitrides or silicates including metal silicates and nitrided metal silicates. In one embodiment, the gate dielectric may include a high-k oxide such as, for example, silicon oxide (SixOy), hafnium oxide (HfxOy), zirconium oxide (ZrxOy), aluminum oxide (AlxOy), titanium oxide (TixOy), lanthanum oxide (LaxOy), strontium titanium oxide (SrxTiyOz), lanthanum aluminum oxide (LaxAlyOz), and mixtures thereof. The gate dielectric layer may be deposited over the fin 140 using any suitable deposition technique known the art, including, for example, atomic layer deposition (ALD), chemical vapor deposition (CVD), physical vapor deposition (PVD), molecular beam deposition (MBD), pulsed laser deposition (PLD), or liquid source misted chemical deposition (LSMCD). The gate electrode may be made of gate conductor materials including, but not limited to, zirconium, tungsten, tantalum, hafnium, titanium, aluminum, ruthenium, metal carbides, metal nitrides, transition metal aluminides, tantalum carbide, titanium carbide, tantalum magnesium carbide, or combinations thereof. The gate electrode may be formed using any suitable metal deposition technique, including, for example, CVD, PVD, and ALD, sputtering, and plating.

In a gate-last process, the gate layer may include a sacrificial gate (not shown) that may be later removed and replaced by a gate dielectric layer and a gate electrode such as those of the gate-first process described above. In an exemplary embodiment, the sacrificial gate may be made of a polysilicon material with a sacrificial dielectric material (e.g., silicon oxide) formed using known deposition techniques known in the art, including, for example, ALD, CVD, PVD, MBD, PLD, LSMCD, sputtering, and plating. Other suitable materials and methods of forming a sacrificial gate are known in the art.

A spacer may be formed on the vertical surfaces of the gate layer and/or the fin. The spacer may be made of any suitable insulating material, such as silicon nitride, silicon oxide, silicon oxynitrides, or a combination thereof, and may have a thickness ranging from 2 nm to approximately 100 nm. In a preferred embodiment, the spacer may be made of silicon nitride and have a thickness ranging from approximately 2 nm to approximately 25 nm. The spacer may be formed by any method known in the art, including depositing a conformal silicon nitride layer over the gate layer, and performing an anisotropic etch to remove the material from the horizontal surfaces of the structure. Further, in various embodiments, the spacer may include one or more layers.

In some embodiments, the hard cap (not shown) may be located above the gate layer. The hard cap may be made of an insulating material, such as, for example, silicon nitride or silicon oxide, capable of protecting the gate layer during subsequent processing steps. In embodiments where the substrate 108 is a bulk substrate, an insulating layer may be deposited around the base of the fin prior to forming the gate layer to insulate the gate layer from the substrate 108. Further, while only a single gate layer is shown, some embodiments may include more than one gate above the fin 140.

Referring now to FIG. 10 following the formation of the gate structure 150, a first block mask 250 may be formed covering all but the first fin region 210. More specifically, the method may include masking all but the first fin region 210 of the semiconductor by forming a protective layer, patterning the desired region, and etching the protective layer from the unprotected regions. The protective layer may include an oxide (e.g. silicon oxide), a nitride (e.g. silicon nitride) or any combinations thereof. Patterning of the desired region may be done through lithographic techniques, to the desired structure. Etching the masking layer stack may be accomplished through any combination of known techniques, such as, for example, RIE, wet stripping and plasma etching.

Referring now to FIGS. 11 and 11 a, a first junction 310 is formed on the source/drain region of the fin 140 in the first fin region 210 using epitaxial growth. The first junction 310 may be any semiconductor material, such as the semiconductor materials listed above. In an embodiment, the first junction 310 may be silicon-germanium. In such embodiments, the silicon germanium material may contain, for example, approximately 20% to approximately 100% germanium, approximately 0% to approximately 80% silicon, and may be doped with p-type dopants such as boron in concentrations ranging from approximately 1×10²⁰ atoms/cm³ to approximately 2×10²¹ atoms/cm3. In other exemplary embodiments, the semiconductor material 170 may be carbon doped silicon. In such embodiment, the carbon doped silicon may contain, for example, approximately 0.5% to approximately 2.5% carbon, approximately 97.5% to approximately 99.5% silicon, and may be doped with n-type dopants such as arsenic or phosphorus in concentrations ranging from approximately 1×10²⁰ atoms/cm3 to approximately 2×1021 atoms/cm3. The first junction 310 may be epitaxially grown on the existing crystal lattice of the fin 140 in the source/drain region.

The terms “epitaxial growth and/or deposition” and “epitaxially formed and/or grown” mean the growth of a semiconductor material on a deposition surface of a semiconductor material, in which the semiconductor material being grown may have the same crystalline characteristics as the semiconductor material of the deposition surface. In an epitaxial deposition process, the chemical reactants provided by the source gases are controlled and the system parameters are set so that the depositing atoms arrive at the deposition surface of the semiconductor substrate with sufficient energy to move around on the surface and orient themselves to the crystal arrangement of the atoms of the deposition surface. Therefore, an epitaxial semiconductor material may have the same crystalline characteristics as the deposition surface on which it may be formed. For example, an epitaxial semiconductor material deposited on a {100} crystal surface may take on a {100} orientation. In some embodiments, epitaxial growth and/or deposition processes may be selective to forming on semiconductor surfaces, and may not deposit material on dielectric surfaces, such as silicon dioxide or silicon nitride surfaces.

Referring now to FIG. 12, the first block mask 250 is removed, and a second block mask 260 is applied such that it only leaves a second region 220 exposed. Fin structures are located in an intermediate region 230 located between, but not included in, the first and second region, and are masked by the first block mask 250 and the second block mask 260. Removing first block mask 250 may be accomplished by any suitable means, such as RIE, plasma etching and wetstripping. Following removal of the first block mask 250, a second block mask 260 may be formed such that only the second region 220 is exposed. Specifically, the method may include masking all but the second region 220 of the semiconductor by forming a protective layer, patterning the desired region, and etching the protective layer from the unprotected second region 220. The protective layer may include an oxide (e.g. silicon oxide), a nitride (e.g. silicon nitride) or any combinations thereof. Patterning of the desired region may be done through lithographic techniques, to the desired structure. Etching the masking layer stack may be accomplished through any combination of known techniques, such as, for example, RIE, wet stripping and plasma etching.

Referring now to FIGS. 13 and 13 a, a second junction 320 is formed on the source/drain region of the fin 140 in the second fin region 220 using epitaxial growth. The semiconductor material may be any semiconductor material, such as the semiconductor materials listed above. In an exemplary embodiment, the second junction 320 may be silicon-germanium. In such embodiments, the silicon germanium material may contain, for example, approximately 20% to approximately 100% germanium, approximately 0% to approximately 80% silicon, and may be doped with p-type dopants such as boron in concentrations ranging from approximately 1×10²⁰ atoms/cm³ to approximately 2×10²¹ atoms/cm3. In other exemplary embodiments, the second junction 320 may be carbon doped silicon. In such embodiment, the carbon doped silicon material may contain, for example, approximately 0.5% to approximately 2.5% carbon, approximately 97.5% to approximately 99.5% silicon, and may be doped with n-type dopants such as arsenic or phosphorus in concentrations ranging from approximately 1×10²⁰ atoms/cm3 to approximately 2×1021 atoms/cm3. The second junction 320 may be epitaxially grown on the existing crystal lattice of the exposed portion of the fin 140.

The terms “epitaxial growth and/or deposition” and “epitaxially formed and/or grown” mean the growth of a semiconductor material on a deposition surface of a semiconductor material, in which the semiconductor material being grown may have the same crystalline characteristics as the semiconductor material of the deposition surface. In an epitaxial deposition process, the chemical reactants provided by the source gases are controlled and the system parameters are set so that the depositing atoms arrive at the deposition surface of the semiconductor substrate with sufficient energy to move around on the surface and orient themselves to the crystal arrangement of the atoms of the deposition surface. Therefore, an epitaxial semiconductor material may have the same crystalline characteristics as the deposition surface on which it may be formed. For example, an epitaxial semiconductor material deposited on a {100} crystal surface may take on a {100} orientation. In some embodiments, epitaxial growth and/or deposition processes may be selective to forming on semiconductor surfaces, and may not deposit material on dielectric surfaces, such as silicon dioxide or silicon nitride surfaces.

Referring now to FIG. 14, the second block mask 260 is removed, and a third block mask 270 is applied covering the first region 210, the second region 220, and the gate structure 150 located in the intermediate region 230. Removing second block mask 260 may be accomplished by any suitable means, such as RIE, plasma etching and wetstripping. Following removal of the second block mask 260, the third block mask 270 may be formed covering the first region 210, the second region 220, and the gate structure 150 located in the intermediate region 230. Specifically, the method may include masking covering the first region 210, the second region 220, and the gate structure 150 located in the intermediate region 230 of the semiconductor by forming a protective layer, patterning the desired region, and etching the protective layer from the unprotected area. The protective layer may include an oxide (e.g. silicon oxide), a nitride (e.g. silicon nitride) or any combinations thereof. Patterning of the desired region may be done through lithographic techniques, to the desired structure. Etching the masking layer stack may be accomplished through any combination of known techniques, such as, for example, RIE, wet stripping and plasma etching.

Referring now to FIGS. 15, 15 a and 15 b, etching is performed to remove the fins located outside the first and second regions, and maintain a continuous gate connection between the first and second region. Removing the third block mask 270 may be accomplished by any suitable means, such as RIE, plasma etching and wetstripping. Following the etch, fins not contained in the first region 210 or the second region 220 may be removed. Additionally, a gate 155 may be formed, where the gate extends from the first region 210 to the second region 220, over the intermediate region 230. Fins that were located between the first region 210 and second region 220 may be removed such that a remnant fin 145 is located beneath the gate 155 in the regions between the first region 210 and second region 220.

Following etching and removal of the mask, a structure remains with a first set of fins 142 is located in a first region 210 and a second set of fins 143 in a second region 220. The first set of fins 142 has a first junction material 310 covering the fins 140 in the source/drain region located on both sides of the gate 155. The second set of fins 143 has a second junction material 320 covering the fins 140 in the source/drain region located on both sides of the gate 155. Located between the first set of fins 142 and the second set of fins 143, is a set of remnant fins 144, containing at least one fin remnant 145. The fin remnant 145 is the portion of the fin 140 left over following etching, and is not used to form any semiconductor structures. In some embodiments, the fin remnant 145 is only present under a gate 155, in the gate region. In other embodiments, the fin remnant 145 may not extend the same length as the first set of fins 142 and the second set of fins 143, but still may contain a portion of the fin in the source/drain region. The gate 155, formed from the gate structure 150, spans the first set of fins 142 to the second set of fins 143, crossing over the remnant fins 144. Additionally, by forming the gate structure 150, prior to removal of fins from unwanted areas, the resulting gate 155 may have a substantially uniform density due to the deposition of material across areas having substantially similar aspect ratios.

The descriptions of the various embodiments of the present invention have been presented for purposes of illustration, but are not intended to be exhaustive or limited to the embodiments disclosed. Many modifications and variations will be apparent to those of ordinary skill in the art without departing from the scope and spirit of the described embodiments. The terminology used herein was chosen to best explain the principles of the embodiment, the practical application or technical improvement over technologies found in the marketplace, or to enable other of ordinary skill in the art to understand the embodiments disclosed herein. It is therefore intended that the present invention not be limited to the exact forms and details described and illustrated but fall within the scope of the appended claims. 

1. A method of forming a semiconductor structure comprising: forming fins on a substrate, wherein at least one fin is located in a first region of the substrate, at least one fin is located in a second region of the substrate and at least one fin is located in an intermediate region of the substrate, wherein the intermediate region of the substrate is located between the first region of the substrate and the second region of the substrate; forming a gate over the at least one fin in the first region of the substrate, the at least one fin in the second region of the substrate and the at least one fin in the intermediate region of the substrate; forming a first mask above at least the intermediate region of the substrate and the second region of the substrate such that the first region is not covered by the first mask; epitaxially growing a first junction on the at least one fin located in the first region of the substrate that is not covered by the first mask; removing the first mask; forming a second mask above at least the intermediate region of the substrate and the first region of the substrate such that the second region is not covered by the second mask; epitaxially growing a second junction on the at least one fin located in the second region of the substrate that is not covered by the second mask; removing the second mask; forming a third mask above at least the first region of the substrate, the second region of the substrate and the gate; removing material from the region not covered by the third mask; and removing the third mask.
 2. The method of claim 1, wherein the first junction comprises a semiconductor material.
 3. The method of claim 2, wherein the semiconductor material comprises silicon, silicon-germanium or silicon-carbon.
 4. The method of claim 1, wherein the second junction material comprises a semiconductor material.
 5. The method of claim 4, wherein the semiconductor material comprises silicon, silicon-germanium or silicon-carbon.
 6. The method of claim 1, wherein the substrate is a semiconductor on insulator substrate.
 7. The method of claim 1, wherein the fin pitch amongst the fins is substantially uniform.
 8. The method of claim 1, wherein the third mask is formed over a portion of the fins in the intermediate region not located below the gate.
 9. The method of claim 1, wherein the removing material from the region not covered by the third mask comprises removing at least the exposed portion of the fins in the intermediate region.
 10. The method of claim 8, wherein the exposed portion of the fins in the intermediate region includes the portion of the fin that is not underneath the gate.
 11. The method of claim 1, wherein the gate has a substantially uniform density. 12-20. (canceled)
 21. The method of claim 1, wherein the removing of the material from the region not covered by the third mask includes removing a majority of the at least one fin located in the intermediate region such that a remnant fin remains under the gate in the intermediate region.
 22. The method of claim 21, wherein the remnant fin does not extend the same length as the at least one fin located in the first region and the at least one fin located in the second region.
 23. A method of forming a semiconductor structure comprising: forming fins on a substrate, wherein at least one fin is located in a first region of the substrate, at least one fin is located in a second region of the substrate and at least one fin is located in an intermediate region of the substrate, wherein the intermediate region of the substrate is located between the first region of the substrate and the second region of the substrate; forming a gate over the at least one fin in the first region of the substrate, the at least one fin in the second region of the substrate and the at least one fin in the intermediate region of the substrate; forming a first mask above at least the intermediate region of the substrate and the second region of the substrate such that the first region is not covered by the first mask; epitaxially growing a first junction on the at least one fin located in the first region of the substrate that is not covered by the first mask; removing the first mask; forming a second mask above at least the intermediate region of the substrate and the first region of the substrate such that the second region is not covered by the second mask; epitaxially growing a second junction on the at least one fin located in the second region of the substrate that is not covered by the second mask; removing the second mask; forming a third mask above at least the first region of the substrate, the second region of the substrate and the gate such that the intermediate region is not covered by the third mask; removing material from the intermediate region not covered by the third mask such that a remnant fin remains, the remnant fin having a length that is shorter than a length of each of the at least one fin in the first region and the at least one fin in the second region; and removing the third mask.
 24. The method of claim 23, wherein the first junction comprises a semiconductor material.
 25. The method of claim 24, wherein the semiconductor material comprises silicon, silicon-germanium or silicon-carbon.
 26. The method of claim 23, wherein the second junction material comprises a semiconductor material.
 27. The method of claim 26, wherein the semiconductor material comprises silicon, silicon-germanium or silicon-carbon.
 28. The method of claim 23, wherein the substrate is a semiconductor on insulator substrate.
 29. The method of claim 23, wherein the fin pitch amongst the fins is substantially uniform. 